How big is the lithography market | Global Analysis & Key Drivers 2025

How big is the Lithography Market?

The market is expanding due to the rising demand for advanced chip manufacturing, growth in printed electronics, and increasing adoption of EUV lithography technologies.

Key Growth Drivers of the Lithography Market

• Rising demand for high-performance semiconductor devices in AI, 5G, and IoT
• Growth of printed electronics and microfabrication applications
• Adoption of EUV and advanced photolithography for smaller process nodes
• Expanding semiconductor manufacturing capacity globally
• Government incentives and strategic investments in domestic chip production

Lithography Market Trends

Lithography market is witnessing trends such as rapid of EUV lithography for advanced nodes, increased deployment of DUV immersion systems for mature processes, and the use of nanoimprint lithography in niche applications. High-NA EUV is pushed to extend Moore and to enhance resolution. Computation lithography and AI-negotiated process optimization are aiding chip makers to maximize chip yield without stretching budget.

Emerging Developments in the Lithography Market

Lithography market is experiencing developments like the commercialization of High-NA EUV tools, strategic partnerships between lithography equipment suppliers and semiconductor foundries, and innovations in photoresist materials to enable smaller nodes. Diversification of the supply chain and regionalization of production of lithography tools are undertaken to counter geopolitical risk. Complex chip designs are also becoming an area of new interest in hybrid lithography techniques.

List of Leading Companies in the Lithography Market

Below is a comprehensive list of the leading market players driving growth in this sector:

1. ASML Holding N.V.

ASML is the global leader in advanced lithography systems, including EUV and DUV technologies, enabling next-generation semiconductor manufacturing with high precision.

2. Nikon Corporation

Nikon provides optical lithography steppers and scanners for semiconductor manufacturing, focusing on advanced node processing and high-resolution patterning.

3. Canon Inc.

Canon manufactures photolithography and nanoimprint equipment for semiconductor, flat-panel display, and storage device production, emphasizing innovation and reliability.

4. Veeco Instruments Inc.

Veeco delivers lithography and patterning solutions for advanced packaging, MEMS, and compound semiconductors, optimizing efficiency and production yield.

5. SÜSS MicroTec SE

SÜSS MicroTec develops mask aligners and coat/develop systems for MEMS, LEDs, and packaging markets, with an emphasis on flexibility and precision.

6. EV Group (EVG)

EVG provides lithography and nanoimprint tools for MEMS, photonics, and advanced packaging, supporting high-volume production with superior alignment accuracy.

7. SMEE (Shanghai Micro Electronics Equipment Co., Ltd.)

SMEE produces lithography systems for integrated circuits, packaging, and display applications, aiming to advance China’s domestic semiconductor industry.

8. JEOL Ltd.

JEOL specializes in electron beam lithography systems offering ultra-fine resolution for semiconductor R&D, nanotechnology, and prototyping applications.

9. Raith GmbH

Raith provides electron beam and nanoimprint lithography solutions for nanofabrication, catering to research institutions and small-scale semiconductor manufacturing.

10. Onto Innovation Inc.

Onto Innovation offers advanced process control and lithography equipment, integrating metrology and inspection to enhance semiconductor yield and performance.

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